MOTORIZED LINEAR ACTUATORS FOR CLEAN ROOM APPLICATIONS

Single Axis Clean Room Compatible Linear Actuators BSMA-CR is a motorized precision ball-screw driven actuator with a carriage guided by the linear bearings installed in the U-shape aluminum housing.

Clean Room rating is achieved through a sealed structure and high durability stainless steel strip cover. The actuator body is electro-less plated for corrosion resistance. Actuator has vacuum suctions ports to exhaust any particles generated by the moving parts.

BSMA-CR actuators are best suited for applications in semiconductor, flat panel display and electronic components manufacturing and can be integrated into multi-axes robotic systems.

SPECIFICATIONS

Stroke: 050 ~ 800 mm

Single or double carriage

Ball screw pitch: 2.5, 5, 10, 16 mm

Repeatability: 2 microns

Load capacity: 100 Kg

Speed: 400 mm/sec

Motor: Nema17, 23 (stepper or brushless servo)

Sensors: home (1), limits (2)

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