Air Bearing Planar XY Table

IntelLIDrives, Inc. has released a new XY table utilizing planar linear motor technology in a single plane direct drive positioning stage. This innovative design offers the unique capability to operate two axes of motion in one plane with one motor. Two component system consists of passive, magnet-free stationary platen, constructed of lightweight composite materials, and dual axes moving forcer, gliding on the air bearings over special "waffle-like "surface called platen. Planar forcer contains two or four linear motor modules oriented 90 degrees to each other. As linear motor modules respond to varying currents, forcer moves across the platen to produce continuous linear motion. Forcers can be controlled in translation and rotation modes to perform XY and theta (couple degrees) motions. Stage is built with field replaceable cable track, enclosing electrical cable and air supply, and a panel, containing user electrical and air connectors for a “plug-and-play” installation in less than 5 minutes. Scalable forcer design provides forces from 25N to 500N, motion repeatability 2 microns, travel length up 1.5 m x 1 m. IntelLiDrives, Inc. Cartesian system is capable of velocities 2 m/sec, compatible with standard micro stepping indexer/drivers and offer a cost effective, compact envelope planar linear positioning system. This system is designed for high accuracy, repeatability and speed, simplifying design by eliminating problem associated with stackable XY tables, where one axis is being carried by another. As a result positioning stage with the Planar XY table offers greater reliability and performance through design simplification and elimination of wear-prone components. Planar XY table system can operate in any orientation (side wall, upside-down) with multiple forcers installed and operated independently on a single platen for high throughput and flexibility in many robotic automation applications Typical applications include pick and place automation, electromechanical assembly, material transfer systems, laser cutting, testing, dispensing and many others.

MOTORIZED LINEAR ACTUATORS FOR CLEAN ROOM APPLICATIONS

Single Axis Clean Room Compatible Linear Actuators BSMA-CR is a motorized precision ball-screw driven actuator with a carriage guided by the linear bearings installed in the U-shape aluminum housing.

Clean Room rating is achieved through a sealed structure and high durability stainless steel strip cover. The actuator body is electro-less plated for corrosion resistance. Actuator has vacuum suctions ports to exhaust any particles generated by the moving parts.

BSMA-CR actuators are best suited for applications in semiconductor, flat panel display and electronic components manufacturing and can be integrated into multi-axes robotic systems.

SPECIFICATIONS

Stroke: 050 ~ 800 mm

Single or double carriage

Ball screw pitch: 2.5, 5, 10, 16 mm

Repeatability: 2 microns

Load capacity: 100 Kg

Speed: 400 mm/sec

Motor: Nema17, 23 (stepper or brushless servo)

Sensors: home (1), limits (2)

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